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Byungwhan Kim - Profile
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Byungwhan Kim
Publications: [ Total 2 ]
Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-Silicon Nitride Thin Films
Dec 28, 2006
Journal of the Korean Physical Society
[ Domestic Journal ]
Byungwhan Kim
Jae Yeong Park
Sang J Hong
Seung S Han
Plasma Etching of Silicon Oxynitride in a Low-Pressure C2F6 Plasma
Oct 28, 2005
Journal of the Korean Physical Society
[ Domestic Journal ]
Byungwhan Kim
Jeong Kim
Soohong Lee
Jae Yeong Park