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Seung S Han

Publications: [ Total 1 ]

Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-Silicon Nitride Thin Films

Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-Silicon Nitride Thin Films

  • Dec 28, 2006
  • Journal of the Korean Physical Society
  • [ Domestic Journal ]