Cleanrooms of MiNDaP Lab. are belong to fusion fab center of Kwangwoon university and located at Rm. 612 of Bima Build. Cleanrooms consist of the white room and the yellow room for research at the interface between bio and microtechnology. It contains several facilities for micro-fabrication, metrology and device characterization. Major pieces of equipment in MiNDaP cleanrooms include: spin coaters, mask aligner, surface profiler, wet etching station, RF/DC sputtering, oven, optical microscope.
|Air Shower Room||Wet Station||DC/RF Sputter||Centrifugal Separater|
|Hot Press||Auto Bate||Electrochemical Analyzer||Microbalance|
|Wet-Station||DI Water Generator||Mask Aligner (UV Exposure)||Alpha-Step (Surface Profiler)|
|Spin Coater & UV Generator||Spin Coater||Digital Hotplate||Programmable Hotplate|
|Convection Oven||Low Pressure Plasma Generator||Ultrasonic Cleaner||Vaccum Oven|
|Electric Furnace||Optical Microscope||Vaccum Oven||Ultrasonicator|