A Bulk Micromachined Lead Zinconate Titanate Cantilever Energy Harvester with Inter-Digital IrOx Electrodes
A Bulk Micromachined Lead Zinconate Titanate Cantilever Energy Ha...: Ingenta Connect
A piezoelectric vibration energy harvester with inter-digital IrO x electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800×1000×20 μm3, which having a silicon supporting membrane, sol–gel-spin coated Pb(Zr52,Ti48)O3 thin film, and sputtered inter-digitally shaped IrO x electrodes, and silicon inertial mass with 1000×1000×500 μm3 to adjust its resonant frequency. The fabricated energy harvester generated 1 μW of electrical power to 470 kΩ of load resistance and 1.4 Vpeak-to-peak from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW·cm−3·g−2. As expected, its electrical failure was significantly improved