A Micromachined Millimeter-Wave Cavity Resonator on Silicon and Quartz Substrates
In this letter, a Ka-band cavity resonator using micromachining process is presented. A two-port cavity resonator is designed using the three-dimensional (3-D) design software, HP HFSS. The cavity resonator is fabricated on a Si substrate and bonded with a Quartz wafer. The resonator shows the resonant frequency of 39 GHz, the insertion loss of 4.6 dB, and the loaded quality factor (QL) and unloaded quality factor (QU) of 44.3 and 107, respectively.
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