Design and Fabrication of Nano-Hole Arrayed Pt Electrodes for CMOS Integrated Bio-Sensor Applications
All of the biosensors which are commercially available are based on the enzymatic electrochemical analysis. Thus, they are disposable due to the use of the enzymes that are living creatures. These biosensors are limited to the in-vivo and mobile sensor system applications. In this paper, a nano-hole (mesoporous) arrayed Pt electrode is investigated for developing the non-disposable sensors without using any enzymes, which are also integrated with silicon CMOS read out circuitry. In comparison of the nano-hole arrayed Pt electrode and the plane (or flat) Pt electrode, the nano-hole arrayed Pt electrode is much more sensitive than the plane Pt electrode to the electrolyte concentrations and the glucose. The current responses of nano-hole arrayed Pt electrode and the plane Pt electrode are approximately 4.62 A/mm2 and 9.91 nA/mm2 respectively in 10 mM glucose solution. This result shows the nano-fabricated mesoporous Pt electrode is promising for CMOS integrated non-disposable sensor applications.
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