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Domestic-journal
[2005]
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Plasma Etching of Silicon Oxynitride in a Low-Pressure C2F6 Plasma
Oct 28, 2005
Journal of the Korean Physical Society
Byungwhan Kim
Jeong Kim
Soohong Lee
Jae Yeong Park
RF MEMS 부품 연구 개발 동향
Apr 28, 2005
The Engineering Magazine For Electronic Components Industry
Jae Yeong Park
차세대이동통신용 RFMEMS 부품과 그 응용
Apr 28, 2005
전기전자재료학회지
Jae Yeong Park
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2000 [2]
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