Nanofabrication of Enzymeless Micro-Biosensors with Mesoporous Platinum and Platinum Black Working Electrodes
In this paper, enzymeless micro-biosensors with mesoporous (nano-pore array with diameter ranging from 2 nm to 50 nm) platinum and platinum black as working electrodes are fabricated, characterized, and compared on a silicon substrate in order to develop continuously monitoring micro-bio chips or sensor systems to be integrated with CMOS readout circuitry. The measured current responses of these fabricated micro-biosensors with a plane Pt electrode, a Pt black electrode, and a mesoporous Pt electrode were 9.74 nA/mm2, 4.42 muA/mm2 and 12.97 muA/mm2 in 10-mM glucose solution, respectively.
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