New Micromachined Inductors on Silicon Substrates
Microinductors with two layer vertically stacked spiraltype copper conductor lines and permalloy core have been fabricated, characterized, and compared using micromachining techniques. In this research, micromachined inductors with vertically laminated magnetic alloy cores are found to have better high frequency characteristics such as high inductance, high quality factor, and low ac resistance resulting in low magnetic core losses at high frequencies, than non-laminated types.
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Although integrated microinductors are in high demand for high frequency applications, their usefulness is limited due to their ...